Olympus AL120-12 Series - Problems during Use and Solutions; Troubleshooting: Warning Codes

Operation Manual Troubles and Countermeasures/When Warning Codes Are Displayed
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Page
5
Problems during Use and Solutions
5-1 When Warning Codes Are Displayed
While not a malfunction, if the loader determines that there is the
possibility that normal wafer loading operations will be hindered, it issues
a warning code on the liquid crystal panel , and halts operations.
In this event, take appropriate countermeasures listed below in the
Warning Codes before pressing the [Start] button again. The loader will
return to normal operation if the problem has been solved correctly.
Warning Codes
Warning
Code No.
Causes and Solutions
W0001
Cause
• The cassette has not been set in the correct position.
Solution
• Reset the cassette in the correct position and press the [Start] button.
W0002
Cause
• The stage has not been set in the correct position.
• The vacuum stage is not set after the inspection time has elapsed.
Solution
•
Reset the stage properly to the wafer transfer position.
• [Note] Do not move the stage until the F-arm completes its up-and-down
movement. Make sure that the stage operation permiss
ion LED is lit
before moving the stage.
W0003
Cause
• The observation window is open when the inspection time is over.
Solution
•
Close the observation window and press the [Start] button to recover.
• [Note] When the macro inspection finishes close the macro observation
window.
W0004
Cause
• The foreign object (wafer) is detected on the A-arm during initialization.
• The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution
• Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
• [Note] To unload the wafer automatically, refer to 5-6 Automatic
Unloading.
W0005
Cause
• The foreign object (wafer) is detected on the F-
arm (macro table side)
during initialization.
• The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution
• Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
• [Note] To unload the wafer automatically, refer to 5-
6 Automatic
Unloading.
W0006
Cause
• The foreign object (wafer) is detected on the F-arm (stage side) and on
the stage table during initialization.
• The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution
•
Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
• [Note] To unload the wafer automatically, refer to 5-
6 Automatic
Unloading.
W0001
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