Olympus AL120-12 Series - Page 64

Troubles and Countermeasures / When Warning Codes Are Displayed Operation Manual
5-2
Page
Warning
Code No.
Causes and Solutions
W0007
Cause
•
The foreign object (wafer) is detected on the macro table during
initialization.
• The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution
• Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
• [Note] To unload the wafer automatically, refer to 5-
6 Automatic
Unloading.
W0008
Cause
•
The foreign object (wafer) is detected on the back macro arm during
initialization.
• The wafer is detected as a foreign object due to vacuum pressure being
too high
Solution
• Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
• [Note] To unload the wafer automatically, refer to 5-
6 Automatic
Unloading.
W0009
Cause
• The foreign object (wafer) is detected on the stage table during
initialization.
• The wafer is detected as a foreign object due to vacuum pressure being
too high.
Solution
• Remove the wafer or set the vacuum pressure within the specifications,
and then press the [Start] button.
• [Note] To unload the wafer automatically, refer to 5-
6 Automatic
Unloading.
W0010
Cause
• The specified slot already contains wafers
Solution
• Remove the wafers and press the [Start] button, or specify another slot to
unload wafers.
W0011
Cause
•
The size of the specified wafer and the wafer to be transferred do not
match
Solution
• Remove the wafers and press the [Start] button, or set correct wafer size.
W0012
Cause
• A wafer is improperly inserted into a slot inside a cassette; it is inserted
diagonally.
Solution
•
Insert the wafer by taking care that both edges of the wafer are in the
same slot, and press the [Start] button.
W0013
Cause
• The thickness of a wafer is different from the standard thickness value.
Solution
• Check to see if two wafers are inserted into the same slot or if the type of
the wafer to be inspected is different from the selected wafer type. If two
wafers are in the same slot, remove one and press the [Start] button. If the
selected wafer type is wrong, press the [Exit] button and redo the wafer
type selection process.
W0014
Cause
• A wafer protrudes from a cassette.
Solution
• Insert the wafer fully into the cassette and press the [Start] button.