Operation Manual Troubles and Countermeasures / When Warning Codes Are Displayed
If the loader is used at a low pressure (-53 KPa or lower) and with sudden changes in
the vacuum pressure, the loader may be unable to detect any wafers remaining in the
transfer path and may cause damage to the wafer(s).
If automatic unloading is performed in this state, the loader can not detect any
remaining wafers and may cause damage to them. Remove the wafer using tweezers
or similar tools and ensure that the cause is dealt with.
Automatic unloading may be unable to work. In this case, remove the wafer using
tweezers or similar tools and check the vacuum pressure before discharging again.
Ensure proper vacuum pressure and discharge when using the loader.
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