Olympus AL120-12 Series - When a Wafer Is on the F-Arm; When a Wafer Is on the A-Arm

Operation Manual Troubles and Countermeasures / Automatic Unloading
5-15
Page
3 When a Wafer is on the F-arm
When the loader stops with a wafer held on the F-arm, the wafer on the
F-arm is vacuumed. Unload the water according the following procedures.
If two wafers are held on the F-arm, unload the wafer that is on the macro
table first.
1. Set the main button to ON. The loader does not operate, but the
warning code [W0005] or [W0006] appears while the wafer is
vacuumed.
2. Removing the wafer using tweezers:
Press the [start] button ①. The wafer vacuum is canceled. Open the
door and remove the wafer using tweezers, etc.
3. Unloading the wafer automatically:
Using the Wafer No. selector buttons, specify the number of the
cassette slot to unload the wafer.
4. The LED in the specified Wafer No. selector button lights up.
5. Press the [Unload] button.
6. After wafer mapping is completed, the wafer is automatically
unloaded into the specified slot.
7. Repeat the procedure from step 2 to unload the remaining wafer.
Mapping has already been executed at this time. You can specify
only a vacant slot (with the LED lit in the Wafer No. selector button).
4 When a Wafer is on the A-arm
When the loader has stopped with wafers held on the A-arm, the vacuum
remains on. Unload the wafer according to the following procedure.
When two wafers are held on the A-arm, unload the wafer on the macro
table first.
1. Set the main button to ON. The loader does not operate, but the
warning code [W0004] appears while the wafer is vacuumed.
2. Removing the wafer using tweezers:
Press the [Start] button and remove a wafer from A-arm using
tweezers.
3. Unloading the wafer automatically:
Using the Wafer No. selector buttons, specify the number of the
cassette slot to unload the wafer.
4. The LED in the specified Wafer No. selector button lights up.