Olympus AL120-12 Series - When a Wafer Is on the Vacuum Stage

Troubles and Countermeasures / Automatic Unloading Operation Manual
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5. Press the [Unload] button.
6. After wafer mapping is completed, the wafer is automatically
unloaded into the specified slot.
5 When a Wafer is on the Vacuum Stage
When the loader has stopped with a wafer held on the vacuum stage, the
vacuum remains on. Unload the wafer according to the following
procedure.
1. Set the vacuum stage to the transfer position.
2. Set the main button to ON. The loader does not operate, but the
warning code [W0006] or [W0009] appears while the wafer is
vacuumed.
3. Removing the wafer using tweezers:
Press the [start] button ①. The wafer vacuum is canceled. Open the
door and remove the wafer using tweezers, etc.
4. Unloading the wafer automatically:
Using the Wafer No. selector buttons, specify the number of the
cassette slot to unload the wafer.
5. The LED in the specified Wafer No. selector button lights up.
6. Press the [Unload] button.
7. After wafer mapping is completed, the wafer is automatically
unloaded into the specified slot.