Olympus AL120-12 Series - Table of Contents; Ack Acro Nspection; Macro Inspection + Back

Operation Manual
Table of Contents
C-2
Page
3 Top Macro Inspection 2-15
4 Back Macro Inspection and 2nd Back Macro Inspection: Setting the Back Macro
Tilt Angle 2-15
5 Observation window for macro inspection （AL120-LMB12-LP3） 2-16
6 Transferring a Wafer onto the Vacuum Stage 2-17
7 Temporarily Registering the Inspection Results: [Registration] Button 2-18
2-4 Stoppage of Transfer ························································· 2-19
1 Temporarily Stopping the Loader during Inspection: [Pause] Button 2-19
2 Removing a Wafer with Tweezers during Inspection: [Wafer Reject] Button 2-19
3 Unloading a Wafer during Inspection: [Unload] Button 2-20
4 EMO: [EMERGENCY OFF] Button 2-20
5 Terminating the Inspection: [Quit] Button 2-20
3
Inspections 3-1
3-1 Preparations ······································································· 3-1
3-2 Inspection Operations ·························································· 3-1
3-2-1 MICROSCOPE INSPECTION ······························································· 3-1
3-2-2 TOP MACRO INSPECTION ································································· 3-3
3-2-3 BACK MACRO INSPECTION ······························································· 3-4
3-2-4 BACK MACRO INSPECTION + 2ND BACK MACRO INSPECTION ······················ 3-5
3-2-5 TOP MACRO INSPECTION + MICROSCOPE INSPECTION ····························· 3-6
3-2-6 BACK MACRO INSPECTION + MICROSCOPE INSPECTION ··························· 3-8
3-2-7 TOP MACRO INSPECTION + BACK MACRO INSPECTION ···························· 3-10
3-2-8 MICROSCOPE INSPECTION + TOP MACRO INSPECTION + BACK MACRO
INSPECTION + 2ND BACK MACRO INSPECTION ······································ 3-11
3-3 Special Operations ···························································· 3-13
3-3-1 CHANGING THE WAFER SELECTION SETTING ········································ 3-13
4
Specifications 4-1
5
Problems during Use and Solutions 5-1
5-1 When Warning Codes Are Displayed ······································ 5-1
5-2 When Error Codes Are Displayed ·········································· 5-4
5-3 How to Reset the Circuit Breaker ········································· 5-12
5-4 Emergency Off ·································································· 5-12