Operation Manual
Table of Contents
5-5 Power Failure ··································································· 5-12
5-6 Automatic Unloading ························································· 5-13
1 During the Top Macro Inspection 5-14
2 During the Back Macro Inspection 5-14
3 When a Wafer is on the F-arm 5-15
4 When a Wafer is on the A-arm 5-15
5 When a Wafer is on the Vacuum Stage 5-16
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