Operation Manual Outline of Operation Procedure
2-4 Stoppage of Transfer
1 Temporarily Stopping the Loader during Inspection: [Pause] Button
The [Pause] ① button stops the wafer in the inspection position and
cancels the inspection time setting.
The LED in the [Pause] button blinks during a pause. The loader
will proceed to the next inspection when the [Start] button is
pressed. The [Pause] ① button does not work when the inspection
time is set to ∞.
2 Removing a Wafer with Tweezers during Inspection: [Wafer Reject] Button
The [Wafer Reject] button is used to remove a wafer in the
inspection position. When the wafer is made removable by pressing
the [Wafer Reject] button, the LED in the [Wafer Reject] button
blinks. To remove a wafer, press the [Wafer Reject] button while
the [Pause] button is pressed or while the wafer is waiting for a start
command input with an inspection time of ∞. You can remove wafers
which have numbers shown on the liquid crystal panel.
• The position from which a wafer can be removed differs depending
on the sequence setting and the state of wafer transfer.
(1) When a wafer is on the stage, the wafer on the stage will be
removed.
Press the [Wafer Reject] button, and you can remove a wafer
from the vacuum stage. As you set the vacuum stage on the
loader after removing a wafer, the next wafer will be
automatically transported to the position where inspection is
performed.
(2) If a wafer is located only at the position where macro inspection
is performed, the wafer at this position is to be removed.
Press the [Wafer Reject] button, to remove a wafer.
As you press the [Start] button after removing a wafer, the next
wafer will be automatically transported to the position where
inspection is performed.
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