Outline of Operation Procedure Operation Manual
3 Unloading a Wafer during Inspection: [Unload] Button
The [Unload] button is used to unload a wafer from the transfer
path in the loader (in the Top or Back Macro inspection position) into
the cassette and transfer the next wafer. This operation is possible
only when two or more types of inspection are selected in the
sequence.
You can also perform this operation using the remote controller.
4 EMO: [EMERGENCY OFF] Button
By pressing the [EMERGENCY OFF] button ① the system can be
powered off.
Make sure to check the Main switch is turned OFF before unlock the
[EMERGENCY OFF] button.
In order to unlock the [EMERGENCY OFF] button rotate its knob to
clockwise.
If there are any wafers in the transfer path, refer to section 5-6
Automatic Unloading.
5 Terminating the Inspection: [Quit] Button
Pressing the [Quit] button terminates inspection halfway, unloads
the inspected or transferred wafers into the cassette, and returns the
loader to its initial state.
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