Operation Manual Inspections
Inspections
3-1 Preparations
1. Make sure that there are no wafers in the transfer path or on the vacuum stage.
If there are any wafers in the transfer path, return them to the cassette using tweezers or similar.
2. Turn the main switch ON.
The A-arm, the F-arm, the L-arm, the wafer presence sensor and other units return to their initial positions
if they are in other positions.
* The loader can be set to skip initialization when power is turned on. (Refer to the test mode in the
maintenance material.)
* Wafers are not transferred to the microscope if the vacuum stage is not in the proper transfer position.
Set the vacuum stage to the transfer position.
3-2 Inspection Operations
3-2-1 Microscope Inspection
1. Set a cassette on the cassette table.
2. Make sure that the [Microscope] LED in the Observation button is lit. ......................................................
If the [Microscope]LED is not lit, press the button to turn on the LED. If LEDs for other types of inspection
are lit, turn them off by pressing their buttons.
3. Confirm the detailed settings for inspection.
1) [Wafer alignment]: Indicates the setting position of where the orientation flat/notch positions on the
stage............................................................................................................................................................
2) [Inspection Time]: Must be set to ∞ (infinite) when only the Microscope inspection is performed. .........
4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). .............................................................................................................
Set the inspection wafer number(s) as needed. ..........................................................................................
5. Set the vacuum stage to the wafer transfer position of the main unit.
If the vacuum stage has already been set in place, reset it or press the [Start] button. ..............................
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