Olympus AL120-12 Series - Inspection

Nomenclature/ Operation/Maintenance Manual
1-4
Page
1-1-5
Operation Panel
1-1-6 FOUP opener operation display panel
・ PRESENCE
・ PLACEMENT
・ LOAD
・ UNLOAD
・ ALARM
・ POWER
FOUP opener operation LED
Observation
setting buttons
Wafer No.
selector buttons
Quit button
Auxiliary function
buttons
Top macro spin
direction control
Top macro spin
speed control
Menu buttons
Wafer alignment
position control
Inspection time
control
Pause button
Start button
Wafer unload
button
4-way button
LED display
Inspection
mode button
Option button