Olympus AL120-12 Series - Page 21

Nomenclature/Wafer Loader Main Body Operation/Maintenance Manual
1-3
Page
1-1-3 Back part [Main Disconnector][AL120-LMB12-F]
1-1-4 Back part [Main Disconnector][AL120-LMB12-LP3]
Vacuum tube receptacle
AC line receptacle（Main Disconnector）
Stage Vacuum tube connector
Circuit Breakers
Vacuum tube receptacle
AC line receptacle（Main Disconnector）
Stage Vacuum tube connector
Circuit Breakers
Clean dry air tube receptacle