Olympus AL120-12 Series

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Operation Manual

Table of Contents

C-1

Page

1 Nomenclature 1-1

1-1 Wafer Loader Main Body ······················································ 1-

１

1-1-1 AL120-LMB12-F ··········································································· 1-１

1-1-2 AL120-LMB12-LP3········································································· 1-2

1-1-3 BACK PART [MAIN DISCONNECTOR][AL120-LMB12-F] ······························· 1-3

1-1-4 BACK PART [MAIN DISCONNECTOR][AL120-LMB12-LP3] ···························· 1-3

1-1-5 OPERATION PANEL ·········································································· 1-4

1-1-6 FOUP OPENER OPERATION DISPLAY PANEL ············································· 1-4

1-2 Remote Controller (Option) ·················································· 1-5

2 Outline of Operation Procedures 2-1

1 Description of Symbols 2-1

2 Operation Procedure 2-1

2-1 Procedure before Starting Transfer ······································· 2-3

Preparation 2-3

1 Turning the Main Switch ON: Main Switch 2-3

2 Cassette Setting 2-3

3 FOUP OPENER(AL120-LMB12-LP3) 2-4

4 Selecting the Type of Inspection Wafer: 4-way button 2-5

5 Setting the Sequence (Inspection Type: [Observation] Button 2-6

6 Setting the Inspection Mode 2-7

7 Selecting Wafers for Inspection: Wafer No. Selector Button 2-9

8 Setting the Orientation Flat and Notch Positions on the Microscope: [Wafer

alignment] Position Control 2-10

9 Setting the Inspection Time: [Inspection Time] Control 2-10

10 Detailed Settings for the Top Macro Inspection: [Top macro spin direction] and

[Topmacro spin speed] Controls 2-10

11 Setting Wafer Alignment when Unloading a Wafer 2-11

2-2 Vacuum Stage ·································································· 2-13

1 How to Move the Vacuum Stage 2-13

2 How to Use the Grip Handle 2-13

3 How to Use the Wafer Rotating Knob 2-13

2-3 Start of Transfer ································································ 2-14

1 Start of Transfer: [Start] Button 2-14

2 Status of the Loader in Operation 2-14

Olympus AL120-12 Series - Page 15