Troubles and Countermeasures / When Error Codes Are Displayed Operation Manual
5-2 When Error Codes Are Displayed
When an error occurs, the loader detects the error and stops all
operations. At the same time, a blinking error code appears on the liquid
crystal panel and a buzzer sounds.
Press the [M1] menu button to silence the buzzer.
When there are no wafers in the transfer path, turn the main switch OFF
and then turn it back to ON.
When there are wafers in the transfer path, turn the main switch OFF,
remove the wafer(s) using tweezers or similar tools, and ensure that the
cause is dealt with.
When an adsorption error has occurred, the loader may be unable to hold wafers
securely. Take care not to perform automatic unloading without dealing with the
cause. Wafers may be damaged.
If any similar errors occur during operation, please contact the OLYMPUS distributor for
your loader.
Please give the distributor the following information:
Product name:
Serial No.:
Error code:
Phenomenon:
W0001
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