Olympus AL120-12 Series - Page 67

Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed
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Error Codes
1. FOSB Table Unit Wafer Mapping Sensor Vertical Movement Control Error
* AL120-LMB12-F
Error No. Error Status Note
E0601
The motor stepout is detected during operation.
U105,U106
E0602
Origin sensor cannot be detected within the set time during initialization.
U104
E0603
The motor driver is over-heated.
2. FOSB Table Unit Wafer Mapping Sensor Horizontal Movement Control Error
*AL120-LMB12-F
Error No. Error Status Note
E0604
Multiple sensors is detected simultaneously
U101,U102,U103
E0605
None of the positioning sensor can be detected
U101,U102,U103
E0606
Origin sensor cannot be detected within the set time during initialization.
U101
E0607
Limit sensor cannot be detected within set time
U102
E0608
Positioning sensor cannot be detected during rotation sensor detection
U103
3. FOUP OPENER Movement Control Error
* AL120-LMB12-LP3 ( for FOUP )
With the error code indication to an operation panel, the error LED of the FOUP opener flashes on and off.
Error No. Error Status
E1501 FOUP clamp action error
Clamp action cannot be completed within set time
E1511 FOUP unclamp action error
Clamp cannot be released within set time
E1512 FOUP dock action error
Dock action cannot be completed within set time
E1513
FOUP undock action error
Dock cannot be released within the set time
E1514
FOUP latch action time out error
Dock action cannot be completed within set time
E1515 FOUP unlatch action error
Dock action cannot be completed within set time
E1516 FOUP door vacuum error
FOUP door vacuum cannot be completed within the set time
E1517 FOUP door vacuum release error
FOUP door vacuum cannot be released within the set time
E1518
FOUP door open action error
FOUP door cannot be opened within the set time
E1519
FOUP door close action error
FOUP door cannot be closed within the set time