Troubles and Countermeasures / When Error Codes Are Displayed Operation Manual
Error No. Error Status
E151A Mapping sensor action error
Sensor cannot be completed within the set time
E151B Mapping sensor return action error
Sensor cannot be returned within the set time
Initialize (origin return action) error
Initialize cannot be completed within the set time
E1521 Load error
Load action is not completed within the set time
E1522 Unload error
Unload action is not completed within the set time
E1523 Z (up and down) axis positioning action error
Positioning action cannot be completed within the set time
E1524 Mapping sensor error
Sensor is already ON before start mapping
Mapping error
Wafer detect sensor ON count and OFF count do not match
E1541 Mode status error
Mode is changed during the action
E1570 Clamp status detecting sensor error
Both clamp and unclamp sensors are ON simultaneously.
E1571 Dock status detect sensor error
Both dock and undock sensors are ON simultaneously.
E1572 Latch status detect sensor error
Both latch and unlatch sensors are ON simultaneously.
Door open close status detect sensor error
Both door open and door closed sensors are ON simultaneously.
E1574 Mapping sensor position status detect sensor error
Both mapping start and mapping return sensors are ON simultaneously.
E15A0 FOUP door retention error
Sucking is released at the door retention status
E15A1 Wafer protrude error
Sticking wafer is detected before wafer vertical action started
E15A2 FOUP cassette setting error (loading sensor)
Cassette is not placed properly
FOUP cassette loading error (load presence sensor)
Cassette is not placed properly
A drop in the clean dry air pressure was detected
E15B0 Interlock error
Interlock signal from the upper stream system is not inputted
E15C0 System parameter error
Unit position mapping sensor error
Sensor is already ON before start mapping
Exhaust fan action error
Exhaust fan action is at the stop status
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