Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed
Error No. Error Status
E15E2 Z axis encoder error
Absolute data of vertical axis servo driver is improper
Z axis servo driver alarm
Alarm of the vertical axis servo driver generates
E15E4 Z axis over run error
Vertical axis is at the over run area
E15FE Dock action foreign substance error
Foreign substance is detected between door and FOUP during dock action
E15FF FOUP cassette setting error (Vertical action detect sensor )
Cassette is not properly set
E1591
Communication error
Communication error between FOUP opener and sub CPU
E1592 FOUP opener action mode error
FOUP action mode (routine/maintenance) setting is not correct
E1593 Motion error
Internal motion is not correct
E1594 Cassette presence error
E1595 Clamp error
Clamp position is not correct
E1596 Door clamp error
Door clamp position is not correct
E1597 Door vacuum error
Door vacuum status is not correct
E1598 Door position error
Door position is not correct
E1599 Wafer protrude sensor error
Sensor detects wafer protrudes
E159A Z axis position error
Z axis (vertical) position is not correct
E159B Y axis position error
Y axis (back and forth) position is not correct
E159C Map error
Mapper is not in correct position
E159D Action time out error
Action cannot completed within the set time
E159E Wafer position, thickness error
Wafer position, thickness is not correct
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