Troubles and Countermeasures / When Error Codes Are Displayed Operation Manual
4. Window lock action control Error
Error No. Error Status Note
E1201
Both lock and release sensors are detected simultaneously U702,U703
E1202
Lock cannot be made within the set time
E1203
Lock release cannot be made within the set time
5. A-arm Vertical Movement/Vacuum Control Error
Error No. Error Status Note
E0101
Detected vertical drive motor step-out
E0102
Multiple sensors are detected simultaneously
U201,
E0103
The middle point sensor cannot be detected after moving to the middle
U202
E0104
Failed to detect at lower limit sensor after lowering action
E0105
Do not move to the original position within the set time.
E0106
Motion did not completed within the set time
E0107
Cannot detect vacuum confirmation within set time U002
E0108
Cannot detect vacuum release within the set time U002
E0109
Not in a specified position when the operation starts
E0110
Specified the operation to the impossible position
E0111
Not in a position where it can be initialized
E0112
The motor driver is over-heated.
6. A-arm Horizontal Movement Control Error
Error No. Error Status Note
E0201 Both of the upper-/lower-end sensors is detected. U205,U207
E0202 The A-arm position is specified
exceeding the motion range in the
software.
E0203 The A-arm is not at the specified position when it starts its movement.
U205,U206,U207
E0204 The unit cannot be initialized within the set time.
U207
E0205
The sensor cannot be detected after moving to the macro position.
U207
E0206
The sensor cannot be detected after moving to the front of the cassette
U206
E0207
The sensor cannot be detected after moving to the cassette position.
U205
E0208 A-arm's movement does not finish within the set time.
E0209
Not in a position where it can be initialized
E0210
The motor driver is over-heated.