Olympus AL120-12 Series - Page 71

Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed
5-9
Page
7. A-arm Horizontal Movement Control Error
Error No. Error Status Note
E0301
The unit cannot be initialized within the set time.
U208
E0302
The A-arm position is specified exceeding the motion range in the software.
E0303
The origin sensor cannot detect the A-arm position during initialization.
U208
E0304
The forward/backward movement does not finish within the set time.
E0305
The positioning sensor cannot detect the A-
arm position at the end of its
movement.
U208
E0306
Not in a specified position when the operation starts U208
8. Notch Alignment/Centering/Macro Vertical Movement/Vacuum Control Error
Error No. Error Status Note
E0401
Both of the lower-end/upper- sensors is detected. U402,U401
E0402
Upper- sensors does not go up within the set time U401
E0403
Lower-end does not go down within the set time. U402
E0404
Vacuum ON status cannot be detected within the set time. U003
E0405
Vacuum OFF status cannot be detected within the set time. U003
E0406
Notch cannot be detected within the set time.
E0407
The rotational motor driver is over-heated.
E0408
Not in a specified position when the operation starts
E0409
The centering sensor cannot detect the wafer. U209,U210
E0410
Shift of wafer exceed centering limit. U209,U210
9. L-arm Vertical Movement/Vacuum Control Error
Error No. Error Status Note
E0801
Both of the lower-end/upper- sensor is detected.
U602,U603 U604
E0802
Neither of the lower-end/upper- sensors is detected.
U602,U603 U604
E0803
The L-arm is not at the specified position when it starts its movement.
U602,U604
E0804
Upper- sensors does not go up within the set time
U602
E0805 Transfer sensor does not go up within the set time
U603
E0806
Lower-end does not go down within the set time.
U604
E0807
Cannot detect vacuum confirmation within set time
U004
E0808
Cannot detect vacuum release within the set time
U004