Olympus AL120-12 Series - Page 72

Troubles and Countermeasures / When Error Codes Are Displayed Operation Manual
5-10
Page
10. L-arm Rotation Movement Control Error
Error No. Error Status Note
E0501
None of the origin and limit sensors detects any error.
U601
E0502
The unit cannot be initialized within the set time.
U601
E0503
The condition of the origin sensor does not change within the set time.
U601
E0504
Movement does not finish within the set time.
E0505
The origin sensor cannot detect.
U601
E0506
Not in a position where it can be initialized
E0507
The motor driver is over-heated.
11. Stage Vacuum Control Error
Error No. Error Status Note
76
Vacuum ON status cannot be detected within the set time.
U001
77
Vacuum OFF status cannot be detected within the set time.
U001
12. F-arm Vertical Movement /Vacuum Control Error
Error No. Error Status Note
E1301
Both of the lower-end/upper- sensors is detected.
U501,U502,
U503
E1302
The F-arm is not in a specified position when the operation starts.
E1303
The upper limit sensor cannot be detected within set time.
U501
E1304
The transfer sensor cannot be detected within set time.
U502
E1305
The lower limit sensor cannot be detected within set time.
U503
E1306
The vacuum ON status of the F-1 arm cannot be detected within set time.
U005
E1307
The vacuum OFF status of the F-1 arm cannot be detected within set time.
U005
E1308
The vacuum ON status of the F-2 arm cannot be detected within set time.
U006
E1309
The vacuum OFF status of the F-2 arm cannot be detected within set time.
U006