Olympus AL120-12 Series - Page 73

Operation Manual Troubles and Countermeasures / When Error Codes Are Displayed
5-11
Page
13. F-arm Horizontal Movement /Vacuum Control Error
Error No. Error Status Note
E1401
Both of the lower-end/upper- sensors is detected.
U504
E1402
The stage side sensor cannot be detected within set time.
U507
E1403
The middle position sensor cannot be detected within set time.
U506
E1404
The macro side sensor cannot be detected within set time.
U505
E1405
The initialization in horizontal direction cannot be completed within set time.
U506
E1406
The motor driver is over-heated.
14. Other Errors
Error No. Error Status
E0001 The cassette has not been set in the correct position.
E0014 A wafer protrudes from a cassette.
E1001
Communication error between the main CPU and Sub CPU.
E1002
No stage sensor detection during the F-arm vertical movement.
E1003
CPU abnormality is detected.
E1004
Wafer exists at a impossible position while observation.
*Vacuum pressure is loud, and there is a wafer in the stage.
Adjust vacuum pressure to the specifications range.
E1006
The +24V power is not properly supplied.
E1007
Main pressure sensor error
E1008
Invalid slot number