Outline of Operation Procedure Operation Manual
2-3 Start of Transfer
1 Start of Transfer: [Start] Button
Press the [Start] button to start inspection.
You can also start inspection using the remote controller.
Inspection starts when the stage is set to the wafer transfer
position, even if the Microscope operation is not selected.
* This function can be disabled by changing the setting.
The loader may have been set to start inspection only after the
type of inspection wafer is specified.
2 Status of the Loader in Operation
The status of the loader is indicated by LED lighting.
“In operation”: Lit green to indicate that the loader is in operation.
“Warning”: Lit yellow to indicate a warning.
“Error”: Lit red and with a buzzer to indicate that an error has
occurred.
The liquid crystal panel shows the following information.
When the loader is in operation: The panel shows the number of
the wafer currently inspected in each inspection position.
On the macro (center) table <M**>
On the vacuum stage <S**>
When a warning has occurred: The panel shows the warning code
number.
When an error has occurred: The panel shows the error code
number.
You can silence the buzzer by pressing [M1] <OFF>.
M02 S01
No |Size |Thick |Comment
1. |300 |775-500 |
E0101
Beep OFF
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