Operation Manual Outline of Operation Procedure
2-2 Vacuum Stage
1 How to Move the Vacuum Stage
The vacuum stage can be moved by rotating the X fine travel knob
and the Y fine travel knob in the lower right section of the stage.
One turn of each knob moves the stage approx. 50 mm in the Y-axis
direction or approx. 37 mm in the X-axis direction.
2 How to Use the Grip Handle
The drive of the X fine travel knob can be released by fully
depressing the clutch of the grip handle . While this clutch
remains depressed, the stage can be moved freely.
Moving the stage without depressing the clutch will affect fine travel
accuracy.
Forcing the grip handle downward will affect vacuum stage accuracy and
damage the stage.
Adhesion of clutch and belt
When the stage is left unmoved for long periods, the clutch and
belt will adhere to each other. This could hinder smooth drive
release operations. To fix this, fully depress the clutch while
holding the X fine travel knob so that it cannot rotate, and move
the lever from side to side.
3 How to Use the Wafer Rotating Knob
A wafer can be rotated 360 degrees by rotating the wafer rotating
knob in the lower section of the grip handle.
One turn of the knob rotates the wafer approx. 180 degrees.
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