Inspections Operation Manual
3-2-3 Back Macro Inspection
1. Set a cassette on the cassette table.
2. Make sure that only the [Back Macro] LED in the Observation button is lit. ..............................................
If the [Back Macro] ED is not lit, press the button to turn on the LED. If LEDs for other types of inspection
are lit, turn them off by pressing their buttons.
3. Confirm the detailed settings for inspection.
1) [Inspection Time]: Enables the setting of Macro inspection time. ............................................................
* The inspection time is common to the Top Macro and Back Macro inspections.
4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). ..............................................................................................................
Set the inspection wafer number(s) as needed. ..........................................................................................
5. Press the [Start] button to transfer the first wafer to the Back Macro inspection position. ...........................
You can change the wafer tilt position (angle) for observation using the [Back Macro Tilt Angle] button. ...
6. After the specified inspection time has elapsed, the wafer is unloaded into the cassette, and the second
wafer is transferred to the Back Macro inspection position.
* Press the [Start] button if the [Inspection Time] control is set to [∞].
7. Subsequent wafers are transferred automatically and sequentially.
8. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the
loader stops.
9. Replace the cassette with the next one, and repeat the procedure from step 1.
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