Inspections Operation Manual
3-2-5 Top Macro Inspection + Microscope Inspection
1. Set a cassette to the cassette table.
2. Select the [Top Macro] and [Microscope] Observation buttons. ...................................................................
When the buttons are selected, the LEDs in the buttons light up.
If the [Top Macro] and [Microscope] LEDs are not lit, press the buttons to turn on the LEDs. If LEDs for
other types of inspection are lit, turn them off by pressing their buttons.
3. Set and confirm the detailed settings for inspection.
1) [Wafer alignment]: Indicates the orientation flat/notch positions on the stage. ......................................
2) [Inspection Time]: Enables the setting of Macro inspection time. .........................................................
3) [Top Macro spin direction]: Enables the setting of wafer rotation direction during Top Macro inspection.
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4) [Top Macro spin speed]: Enables the setting of wafer rotation speed during Top Macro inspection. ......
4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). ..............................................................................................................
Set the inspection wafer number(s) as needed. ..........................................................................................
5. Press the [Start] button to transfer the first wafer to the Top Macro inspection position. .............................
Top Macro Inspection is started.
6. After the specified inspection time has elapsed, the macro table is lowered and the first wafer is
transferred onto the vacuum stage.
After the first wafer is transferred onto the vacuum stage, the second wafer is transferred to the Top Macro
inspection position, and the Top Macro inspection of the second wafer is started. After the specified
inspection time has elapsed for the Top Macro inspection of the second wafer, the macro table is lowered
for the next wafer.
* Press the [Start] button if the [Inspection Time] control is set to [∞].
* Wafers are not transferred onto the microscope if the stage is not in the wafer transfer position at the time
of wafer transfer.
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