Olympus AL120-12 Series - Full Inspection Sequence

Operation Manual Inspections
3-11
Page
3-2-8 Microscope Inspection + Top Macro Inspection + Back Macro Inspection +
2nd Back Macro Inspection
1. Set a cassette on the cassette table.
2. Select the [Top Macro], [Back Macro], [2nd Back Macro] and [Microscope] Observation buttons. All the
Observation buttons are normally turned on (the LEDs are lit) when the power is turned on. .................... 
If any of the [Top Macro], [Back Macro], [2nd Back Macro] and [Microscope] LEDs are not lit, press the
buttons to turn on the LEDs.
* [2nd Back Macro] can be selected only when [Back Macro] is selected.
3. Set and confirm the detailed settings for inspection.
1) [Wafer alignment]: Indicates the specified notch positions on the stage. .............................................. 
2) [Inspection Time]: Enables the setting of Macro inspection time. .......................................................... 
3) [Top Macro spin direction]: Enables the setting of wafer rotation direction during Top Macro inspection.
............................................................................................................................................................... 
4) [Top Macro spin speed]: Enables the setting of wafer rotation speed during Top Macro inspection. .... 
4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). ............................................................................................................. 
Set the inspection wafer number(s) as needed. .......................................................................................... 
5. Press the [Start] button, and the first wafer is transferred to the Top Macro inspection position. ................ 
The loader begins Top Macro inspection.
6. After the specified inspection time has elapsed, the macro table is lowered and the loader proceeds to
Back Macro inspection.
You can change the wafer tilt position (angle) for observation using the [Back Macro Tilt Angle] button. .. 
* Press the [Start] button if the [Inspection Time] control is set to [∞].
7. After the specified inspection time has elapsed, Back Macro inspection is completed and the first wafer is
transferred onto the vacuum stage.
8. After the first wafer is transferred onto the vacuum stage, the second wafer is transferred to the Top Macro
inspection position, and the loader starts the Top Macro inspection of the second wafer.
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