Inspections Operation Manual
9. After the specified inspection time has elapsed for the Top Macro inspection of the second wafer, the
macro table is lowered and the loader starts the Back Macro inspection of the second wafer.
10. After the specified inspection time has elapsed for the Back Macro inspection of the second wafer, the
L-arm is lowered. The wafer is placed on the macro table and rotated counterclockwise about 20 degrees,
and then the loader proceeds to the 2nd Back Macro inspection.
11. After the specified inspection time has elapsed for the 2nd Back Macro inspection of the second wafer,
the L-arm is lowered, waiting for the next wafer.
* Press the [Start] button if the [Inspection Time] control is set to [∞].
* Wafers are not transferred onto the microscope if the stage is not in the wafer transfer position at the time
of wafer transfer.
* By setting the vacuum stage to the wafer transfer position during Top Macro or Back Macro inspection, the
Macro inspection is terminated before the inspection time is completed. Microscope inspection is given
preference and the wafer is transferred onto the vacuum table.
* If the Microscope inspection is not required, press the [Unload] button. The first wafer is unloaded into the
cassette and the second wafer is transferred to the Top Macro inspection position.
* If [2nd Back Macro] is selected for the inspection sequence, refer to [3-2-4 Back Macro Inspection + 2nd
Back Macro Inspection].
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