Inspections Operation Manual
3-2-7 Top Macro Inspection + Back Macro Inspection
1. Set a cassette on the cassette table.
2. Select the [Top Macro] and [Back Macro] Observation buttons. ..................................................................
When the buttons are selected, the LEDs in the buttons light up.
If the [Top Macro] and [Back Macro] LEDs are not lit, press the buttons to turn on the LEDs. If LEDs for
other types of inspection are lit, turn them off by pressing their buttons.
3. Confirm the detailed settings for inspection.
1) [Inspection Time]: Enables the setting of Macro inspection time. ..................................................................
* The inspection time is common to the Top Macro, Back Macro and 2nd Back Macro inspections.
2) [Top Macro spin direction]: Enables the setting of wafer rotation direction during the Top Macro inspection.
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3) [Top Macro spin speed]: Enables the setting of wafer rotation speed during the Top Macro inspection. .....
4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). ..............................................................................................................
Set the inspection wafer number(s) as needed. ..........................................................................................
5. Press the [Start] button to transfer the first wafer is transferred to the Top Macro inspection position. .......
6. After the specified inspection time has elapsed, the macro table is lowered and the loader proceeds to
Back Macro inspection.
You can change the wafer tilt position (angle) for observation using the [Back Macro Tilt Angle] button. ...
* Press the [Start] button if the [Inspection Time] control is set to [∞].
7. After the specified inspection time has elapsed, the wafer is unloaded into the cassette, and the second
wafer is transferred to the Top Macro inspection position.
Subsequent wafers are transferred automatically and sequentially.
8. After the last wafer is unloaded into the cassette, the operating units return to their initial positions and the
loader stops.
9. Replace the cassette with the next one, and repeat the procedure from step 1.
If [2nd Back Macro] is selected for the inspection sequence, refer to [3-2-4 Back Macro Inspection + 2nd
Back Macro Inspection].
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