Outline of Operation Procedure Operation Manual
5 Observation window for macro inspection
AL120-LMB12-LP3
1) The macro observation window can be open during macro
inspection.
Make sure to close the macro observation window after
macro inspection.
If it remains open error code
“W0003” shows.
.
Do not get a hand caught in the lid of FOUP opener, it may cause serious
injury.
For your safety, macro observation window is locked except macro
inspection.
Do not open the macro observation window when it is locked. If you try to
open the window forcedly, the system may get damage.
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