Operation Manual Outline of Operation Procedure
6 Transferring a Wafer onto the Vacuum Stage
To transfer a wafer onto the vacuum stage during the Microscope
inspection, move the vacuum stage to the loader.
Stage Operation Permission LED turns green on the detection sensor
of the stage when F-arm finished descended.
The vacuum stage cannot be in use when Stage Operation
Permission LED ① is turned OFF.
By selecting 「Buzzer ON」 in the system setting buzzer is generated
when the stage is ready to move
In the inspection sequence composed of the Top Macro inspection,
the Back Macro inspection and the Microscope inspection, when the
vacuum stage is moved to the wafer transfer position during the Top
Macro inspection, the loader can proceed to the Microscope
inspection by interrupting the Back Macro inspection.
Do not move the vacuum stage until the Stage Operation Permission LED lights up.
Moving the stage is dangerous as a wafer may be released for transfer.
If the stage is moved during transfer, a wafer may be transferred in an incorrect
position and be damaged.
If the vacuum stage is moved before the stage up and down movement is completed,
the warning W0002 is shown on the liquid crystal panel.
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