Operation/Maintenance Manual Introduction/Daily Check
Press Start button
No |Size |Thick |Comment
1. |300 |775-500 |
Recall Wafer Setting Memory
5. Daily Check
1. Confirm the following points before operating the loader.
(1) Vacuum supply pressure: -67KPa to -80KPa
When there are not a vacuum gauge and a regulator, please contact it to the OLYMPUS distributor.
(2) Clean dry air supply pressure : 0.5MPa to 0.6MPa. [AL120-LMB12-LP3]
(3) Make sure that there are no wafers or tools inside the wafer loader
2. Confirm the following points before starting the inspection.
(1) Make sure that the power is on (Check the liquid crystal panel)
Turn the main switch ON and make sure that each arm position is
initialized and the model name is shown on the liquid crystal panel.
The loader may have been set to skip initialization when the power
is turned on. This is not a malfunction. The loader executes
initialization when the [Start] button is pressed.
(2) Check the Emergency Off Switch
When the Emergency Off Switch is pressed, make sure that the power supply shuts down and the main
switch turns OFF.
(3) Confirmation of automatic power supply interception of FOUP opener
Open the observation window, and select [Test Program] -> [Test No.1] -> <Menu2>[M2], and then start
<Z axis movement check> by pressing the start switch.
Make sure that the door of the FOUP opener rises and the power of the FOUP opener is shutoff by the
interlock switch.
(4) Please make sure to close the observation window for macroinspection before turn on the power.
Please never put the hand in the FOUP door while this device is working
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