Olympus AL120-12 Series - Loader Utilities and Environment

Operation Manual Specifications
4-3
Page
Item
AL120-LMB12-F
AL120-LMB12-LP3
9. Cassette setting
Installation height
900mm±10mm
Cassette positioning
KINEMATIC COUPLING USED system to SEMI E57-0600
Cassette clamp
Nothing
Automatic
Cassette door Opening and
closing
Nothing (manual)
Automatic
*hand-open type FOSB can be mounted by
opening its lid.
10. Loader Utilities
Loader power supply voltage
AC100 to 120 V ± 10%, 3.0 A
AC220 to 240 V ± 10%, 1.7 A
Power supply frequency
50/60 Hz ± 5 Hz
Circuit breaker capacity
3.0 A
Vacuum
−67 to −80 kPa
Vacuum discharge
40 Liter/min. or more (including vacuum supply for the stage)
Vacuum connection tube
1/4-inch soft polyurethane tube with insert pipe joint
Clean dry air pressure
N/A 0.5MPa to 0.6MPa
Clean dry air flow
N/A 43 liter / min. or more (for load port)
Clean dry air connection
tube
N/A
1/4-inch soft polyurethane tube with insert
pipe joint
11. Operating Environment
Place of use
Indoor use (in a clean room)
Altitude
1000 m or lower
Temperature
15 to 28°C (Storage and transport temperature: 0 to 40°C)
Humidity
45 to 75% (Storage and transport humidity: 35 to 85%)
Voltage fluctuation
±10%
Pollution degree
2 (IEC60664)
Installation category
(Overvoltage category)
II (IEC60664)
12. Dimensions and Weight
Loader dimensions
1508 (W) × 1284 (D) × 1383 (H) mm
*does not include protorusion
1508 (W) × 1390 (D) × 1383 (H) mm
*does not include protorusion
Weight
Approx. 270 kg Approx. 360 kg