Operation Manual Outline of Operation Procedure
2-1 Procedure before Starting Transfer
Preparation
Make sure that there are no wafers in the transfer path or on the vacuum stage.
If any wafer is in the transfer path, return the wafer to the cassette using tweezers or the like.
1 Turning the Main Switch ON: Main Switch
Turn the main switch ON.
If the units are not in the position, return to its initial position.(This
is called initialization).
If the vacuum stage is not in the proper transfer position, the
warning code W0002 is displayed. Set the vacuum stage in the
transfer position.
2 Cassette Setting
AL120-LMB12-F
Set the cassette to the cassette guide①.
Please set the cassette to Kinematic coupling pins
Please make sure the lid at front side of FOSB has been open,
when you set the cassette.
Set the cassette carefully to prevent wafers from popping out.
If a deformed cassette is used, there is a risk that wafers could get damaged.
When setting a cassette in position, make sure to see if the cassette rattles due
to deformation.
We take no responsibility for the breakage of wafers or any other problems in
setting the cassette.
AL120-LMB12-F is dedicated to FOSB.
If you cannot set the cassette to Kinematic coupling pins, contact Olympus.
①
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