Outline of Operation Procedure Operation Manual
AL120-LMB12-LP3
Please set the cassette to Kinematic coupling pins
3 FOUP OPENER(AL120-LMB12-LP3)
When the cassette is set to the correct position, “PRESENCE”
“PLACEMENT” of “FOUP OPENER OPERETION LED” light is
on.
[PRESENCE]
[PLACEMENT]
When the start button of the Operation panel of is pushed,
inspection starts.
•
Be careful not to have hand pinched. Cassette is moving to back and forth when
inspection gets started and finished .
•
In LOAD and UNLOAD LED on the FOUP opener is blinking.
Make sure to check if UNLOAD-LED is off before unloading the cassette.
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