Outline of Operation Procedure Operation Manual
Operation Flow Controls/Units Reference page section
Turn the main switch ON
Main switch 2-3 1
Set a cassette in place on the cassette table
Cassette guide and cassette setting 2-3 2
----- Select the type of inspection wafer 4-way button 2-5 4
----- Set the sequence (type of inspection)
[Observation] setup buttons 2-6 5
----- Set the inspection mode (All or Sampling) Inspection mode button 2-7 6
-----
Set the orientation flat and
notch positions on the microscope
[Wafer alignment] position control 2-10 8
----- Set the inspection time
[Inspection Time] control 2-10 9
-----
Set the wafer rotation direction
during Top Macro inspection
[Top macro spin direction] control 2-10 10
-----
Set the wafer rotation speed
during Top Macro inspection
[Top macro spin speed] control 2-10 10
Press the Start button [Start] button 2-14 1
FOUP Clamp, Dock, Latch open AL120-LMB12-LP3 only
Wafer mapping
Start transfer
Top Macro inspection
[Top macro spin direction] and [Top macro spin speed] settings can be changed
Back Macro inspection [Back Macro Tilt Angle] setting can be changed
2nd Back Macro inspection
[Back Macro Tilt Angle] setting can be changed
-------- Set the vacuum stage in place Transfer of wafer onto the vacuum stage 2-17 6
Microscope inspection
To Next Page
Loading...
