Inspections Operation Manual
3-2-6 Back Macro Inspection + Microscope Inspection
1. Set a cassette on the cassette table.
2. Select the [Back Macro] and [Microscope] Observation buttons. ................................................................
When the buttons are selected, the LEDs in the buttons light up.
If the [Back Macro] and [Microscope] LEDs are not lit, press the buttons to turn on the LEDs. If LEDs for
other types of inspection are lit, turn them off by pressing their buttons.
3. Set and confirm the detailed settings for inspection.
1) [Wafer alignment]: Indicates the notch positions on the stage. ...............................................................
2) [Inspection Time]: Enables the setting of Macro inspection time. ............................................................
4. Set and confirm the inspection mode.
Select All or Sampling (P1 to P10). ..............................................................................................................
Set the inspection wafer number(s) as needed. ..........................................................................................
5. Press the [Start] button to transfer the first wafer to the Back Macro inspection position. ...........................
You can change the wafer tilt position (angle) for observation using the [Back Macro Tilt Angle] button. ...
6. After the specified inspection time has elapsed, the Back Macro inspection is completed, and the first
wafer is transferred onto the vacuum stage.
After the first wafer is transferred onto the vacuum stage, the second wafer is transferred to the macro
table position, and the loader starts Back Macro inspection of the second wafer. After the specified
inspection time has elapsed for the Back Macro inspection of the second wafer, the L-arm is lowered for
the next wafer.
* Press the [Start] button if the [Inspection Time] control is set to [∞].
* Wafers are not transferred onto the microscope if the stage is not in the wafer transfer position at the time
of wafer transfer.
* By setting the vacuum stage to the wafer transfer position during Back Macro inspection, the Back Macro
inspection is terminated before the inspection time is completed. Microscope inspection is given preference
and the wafer is transferred onto the vacuum table.
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