Adjustments Maintenance manual
Adjusting the Vacuum Switches
2-2
Adjusting the Vacuum Switches
The vacuum switches are set for normal operation at a vacuum pressure level of -67KPa to -80KPa.
The vacuum switches must be readjusted if the vacuum pressure is outside the range of -67KPa to-80KPa.
When the vacuum pressure is above -80KPa, the wafer may be bent on the wafer
vacuum port.
When the vacuum pressure is below -53KPa and when there is a rapid change in
the vacuum
pressure level, the wafer may be damaged.
Use of the regulator unit (option) is recommended when the vacuum pressure is
above -80KPa.
1 How to adjust vacuum switches
Tools
Phillips-head screwdriver (No. 1)
Flat-blade screwdriver（4.5mm）
Remove the cover ①. You can find following vacuum switches.
U001:Stage table
U002: A-arm
U003: Center table
U004: L-arm
U005: F-arm #1
U006: F-arm #2
Perform vacuum switch sensitivity adjustment using the
testprogram No. 18.
When the vacuum switch is ON, the output display LED 2 turns red
1) Place the wafer to be adjusted on the vacuum port, and turn the
solenoid valve ON.Check that the vacuum switch is turned
ON.If the vacuum switch is not turned ON, turn the adjustment
knob ② counter clockwise until the vacuum switch is turned
ON, and further give it a 10° turn.
2) When removing the wafer and turning on the solenoid valve
again, please confirm that the output display LED② is turned
off.
If it turns on, the detection setting pressure set above is too low,
so return the adjustment screw ③ to the right and turn it off.
3) If normal operation is not attained after performing the above
adjustments, check the vacuum pressure and flux.
①
Ｕ ０ ０ ２Ｕ ０ ０ ６ Ｕ ０ ０ １Ｕ ０ ０ ５ Ｕ ０ ０ ３Ｕ ０ ０ ４
②
③
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