Olympus AL120-12 Series - Page 32

Test Programs Maintenance Manual
3-4
Page
Table 2-2: Test Functions
Test No./
Test Name
Function Outline
No.1
Wafer
mapping
sensor
movement
check
( AL120-LMB
12-F )
<Wafer mapping sensor movement check>
This program can be used to check and adjust the height of the wafer sensor.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：Vertical movement <Vertical movement check>
[M2]：Horizontal movement <Horizontal movement check>
Do not continue the operation for longer than 5 minutes.
Wait for longer than one minute before restarting the operation.
[M1]
：
Vertical movement
If the loader has not been initialized, initialization starts.
①Raises the wafer sensor to the cassette insertion height ②Lower limit ③Mapping end position
④Lower limit
The loader then repeats steps ① to ④.
・ Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・ When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・ Press the [Quit] button, and the wafer sensor returns to its initial position and the loader stops the
operation.
[M2]: Horizontal movement
If the loader has not been initialized, initialization starts
①Raises the wafer sensor to the cassette insertion height. ②Cassette insertion position ③Cassette
escape position.
The loader then repeats steps ② to ③.
・ Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・ When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・ Press the [Quit] button, and the wafer sensor returns to its initial position and the loader stops the
operation.
No.1
FOUP-OPE
NER
movement
check
( AL120-LMB
12-LP3)
<FOUP Opener movement check>
This program can be used to check and adjust the height of the wafer sensor.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：FOUP Clamp, Dock, Door vacuum, Door Clamp <Menu1>
[M2]：Door open, Wafer mapping, Z-axis (vertical) movement <Menu2>
・ Do not install the cassette except for Door vacuum.
・ Do not install the adapter for 8-inch cassette. (The error occurs.)
It becomes an error by overheating when continuously operating.
Continuous operation must be limited to 5 times or less in order to
protect the motor from damage.
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