Olympus AL120-12 Series - Page 33

Maintenance Manual Test Programs
3-5
Page
Test No./
Test Name
Function Outline
[M1]
：
FOUP Clamp, Dock, Door vacuum, Door Clamp <Menu1>
This program can be used to check the operations of FOUP Clamp, Dock, Door vacuum and Door
Clamp.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：FOUP Clamp <FOUP Clamp movement check>
[M2]：Dock <FOUP Dock movement check>
[M3]：Door vacuum <FOUP Door vacuum hold check>
[M4]：Door Clamp <FOUP Door latch movement check>
[M1]
：
FOUP Clamp <FOUP Clamp movement check>
If the loader has not been initialized, initialization starts.
①FOUP Clamp ②FOUP Unclamp
The loader then repeats steps ① to ②.
・ Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・ When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・ Press the [Quit] button, and the FOUP opener returns to its initial position and the loader stops the
operation.
[M2]
：
Dock <FOUP Dock movement check>
If the loader has not been initialized, initialization starts.
①FOUP Clamp ②FOUP Undock position ③FOUP Dock position
The loader then repeats steps ② to ③.
・ Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・ When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
・ Press the [Quit] button, and the FOUP opener returns to its initial position and the loader stops the
operation.
[M3]
：
Door vacuum <FOUP Door vacuum hold check>
If the loader has not been initialized, initialization starts.
①FOUP Clamp ②FOUP Dock position ③FOUP Door vacuum ④Cancel FOUP Door vacuum
The loader then repeats steps ③ to ④.
・ Press the [Start] button to pause the operation at the break point, and press it again to continue the
operation.
・ When an error occurs, the loader displays the same error code as in the regular operation, and then
stops.
*If the operation starts without installing the FOUP cassette, the error occurs.
・ Press the [Quit] button, and the FOUP opener returns to its initial position and the loader stops the
operation.