Olympus AL120-12 Series - Vacuum Stage Components

Adjustments Maintenance manual
2-2
Page
④ After settings are completed, press the [M1] button <Save> and store
setting, press the [Quit] button to terminate Test 24.
3) Wafer mapping parameter setting registration
Using Test 11, set the wafer mapping parameters according to the cassette state and the wafer thickness.
① Press the Wafer No. selector button [11], then press the [Start] button.
② The submenu appears on the liquid crystal panel.
[M1]: Executes the automatic mapping parameter adjustment <Mapping
auto adjust>.
Press the [M1] button <Auto>.
③ The wafer types currently registered are displayed on the liquid crystal
panel.
Using the 4-way button, move the <x> to the item to add, then press the
[M1] button <Ok>.
④ Insert the wafers to be registered in the lowest and highest slots of the
cassette, and set the cassette in the cassette table.
⑤ The menu appears on the liquid crystal panel.
[M1]: Do the mapping adjustment <Adjust mapping>.
Press the [M1] button <Adjust>.
⑥ The mapping operation starts.
⑦ If the display shows <result : OK> to indicate that the mapping data has
no problems, press the [M2] <Save> button to register the data.
If the display shows NG (No Good), check the wafer insertion slot
positions in the cassette.
⑧ After the setting is completed, press the [Quit] button to terminate Test 12
[M1] automatic mapping parameter adjustment.
M1:Mapping auto adjust
M2:Mapping result display
M3:Input parameter
Auto Disp Manual
M1:Adjust mapping
M2:Save
result : OK
1.Start:48500 Thick1:1500 Thick25:1500
Adjust Save
No |Size |Thick |Speed |comment
x1 | 300 |775-500 |High |
2 | 300 |775-500 |High |
3 | 300 |775-500 |High |
4 | 300 |775-500 |High |
5 | 300 |775-500 |High |
6 | 300 |775-500 |High |
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