Test Programs Maintenance Manual
[M3]: Manual input of mapping parameters <Input parameter>
This program can be used to modify mapping parameters.
Using the 4-way button, select the number of the wafer type to modify from the list of wafer type
numbers displayed on the liquid crystal panel, and then press the [Start] button.
①Parameter setting items are displayed on the liquid crystal panel.
Select the parameter to change with the 4-way button.
[M2]: Save <Save>
[M3]: Delete<Back space>
[M4]: Terminate display <Exit>
[No.1 to No.9]: Input numbers 1 to 9. [No.10]: Input 0.
[No.21]: Input -. (To be used only for the offset start position)
4-way buttons [RIGHT] and [LEFT]: Move the cursor.
4-way buttons [UP] and [DOWN]: Move from one item to another
Settable parameters
Item...................................................Set value ...............Default
・Number of cassette slots
<Slot>................................................:25/26 ....................25
・Slot pitch
<Pitch>..............................................:6350/10000 ..........10000
・Upper limit of wafer position error
<Upper> ..........................................:10 to 3000...............1500
・Lower limit of wafer position error
<Lower> ..........................................:10 to 3000...............1500
・Upper-limit value of wafer thickness
<Thick Upper>...................................:90 to 5000.............1250
・Lower-limit value of wafer thickness
<Thick Lower>...................................:90 to 400................250
・Start position
<Start Position>..................................................................36500
②Select an item using the 4-way buttons and input a value using the wafer No. buttons.
③To register the modified values, press [M2]: Save <Save>.
To terminate the program without modification, press [M4]: Terminate display <Exit>.
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