Test Programs Maintenance Manual
Reference:
Standard position：
Empty arm insertion height： 2mm below wafer
Vacuum fine-adjustment value： 6mm
[M2]：Check upper and lower limit positions <M2:Upper/Lower limit position check>
This program can be used to check the sensor detection status by moving the A-arm vertically.
If the loader has not been initialized, initialization starts.
[M1]：Raise 20 mm
[M2]：Raise all stokes by defined values.
[M3]：Initialize the A-arm.
[M4]：Excitation: OFF
The origin sensor status is displayed in Wafer No.
[No.1]：Detect the origin sensor: ON:OFF
• Press the [Quit] button, and the loader executes initialization and stops the operation.
No. 13
A-arm origin
in
backward/for
ward and
side-to-side
direction
check
<A-arm origin sensor check>
This program can be used to check and adjust the A-arm height.
Press the [Start] button.
Select the item to adjust using the menu buttons on the liquid crystal panel.
[M1]：Check the origin in backward/forward direction <A-arm backward/forward>
[M2]：Check the origin in side-to-side direction <A-arm side-to-side>
Do not continue the operation for longer than 5 minutes.
Wait for longer than one minute before restarting the operation.
[M1]：Check the origin in backward/forward direction <A-arm backward/forward>
If the loader has not been initialized, initialization starts.
①Move the A-arm to the first wafer insertion height.
4-way button [Right]：Move backward by one pulse.
4-way button [Left]： Move forward by one pulse
[M1]：Initialize
[M2]：Move forward by 10 mm
[M3]：Move backward by 10 mm
[M4]：Excitation ON/OFF
The sensor status is displayed on Wafer No.
[No.1]：Origin sensor detection ON:OFF
• Press the [Quit] button, and the loader executes initialization and stops the operation.
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