Test Programs Maintenance Manual
:
Check the error log and software version.<Version and error log display>
This program can be used to check the software version and the history of error occurrences
The software version or error log displayed can be cleared and the error log date can be set by
manipulating the menu buttons on the liquid crystal panel.
[M1]: Clear <Clear>
[M2]: Set date <Date>
[M3]: Go to the previous page <PageUp>
[M4]: Go to the next page <PageDn>
Move the cursor using the 4-way buttons [UP], [DOWN], [RIGHT] and [LEFT].
① Press the [Start] button.
The software version and error log are displayed on the liquid crystal panel.
[M1]: Press the <Clear> button and then the [Start] button to delete the error log
Software version <Ver.>: V01.01 V01.01
Error code display:
Error code <Code>: Refer to the Operation Manual for error code details.
Sequence in which the error occurred <Seq>: Number of the sequence in which the error occurred
Step in which the error occurred <Step>: Number of the step in which the error occurred
Date and time of error occurrence <Date><Time>
・ The first segment of Software version indicates version of the M-CPU board and the second segment
indicates version of the S-CPU board.
・ Press the[Quit] button to quit this program.
・ Up to ten errors are recorded in the error log.
・ Data is cleared after the loader has remained off for continuous two weeks.
・ If the date has been cleared, use [M2]: <Date> to set the date.
[M2]: Set date <Date>
① Parameters to be set are displayed on the liquid crystal panel.
Select the parameters to be changed using the 4-way buttons.
[M2]: Save <Save>
[M3]: Delete <Back space>
[M4]: Exit the display <Exit>
[No.1 to No.9]: Input numbers 1 to 9
4-way buttons [RIGHT] and [LEFT]: Move the cursor.
4-way buttons [UP] and [DOWN]: Move between items.
Parameters that can be set:
• Year <Year> the last two digits of a calendar year
• Month <Month>
• Date <Date>
• Hour <Hour>
• Minute <Minute>
• Second <Second>
② Select an item using the 4-way buttons, and input a value using the [Wafer No.] buttons.
③ After the item has been corrected, press [M2]: <Save> to register the corrected item.
To quit the program without correcting the item, press [M4]: Exit the display <Exit>.