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Maintenance
10.6 Filament replacement
10.7 Filter Mat
Cleaning the
filter mat
The filter mat at the air entrance has to be cleaned if a substantial layer of dust has
accumulated. Use a vacuum cleaner to clean the filter mat. In case of severe Filter mat
clogging, it is recommended to replace the filter mat.
Replacing the
filter mat
Tools required Screwdriver Torx T10
Procedure 1 Turn off the emission and C-SEM of the GSD 320 using the QUADERA software, or
the front panel.
2 Wait 10 minutes (ion source cooling time).
3 Turn off the pumps via <Shutdown> command.
4 Wait for the system to be vented (approx. 10 minutes).
5 Turn off the power switch and unplug the power connector.
6 Remove the cover (Refer to Removing the front cover on page 23).
7 Pull the filter mat together with the holder off the ventilator with your hand. See
Figure 10-22.
8 Clean/replace the filter mat and place it together with the holder on the ventilator.
9 Reinstall the cover.
10 Reinsert the mains power connector.
NOTE
Instructions for replacing the filament for a Closed HS Ion Source can be found in the
PrismaPlus Operating Manual BG 5214.
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