Pfeiffer Vacuum OMNISTAR - Replacing the orifice of the ThermoStar

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Maintenance
10.9 Replacing the orifice of the ThermoStar
Tools required
 Special tool for GSD 320
 Open ended wrenches size 13 and 1/4 inch
 Hexagon socket wrench size 2.5
Procedure 1 Turn off the emission and C-SEM of the GSD 320 using the QUADERA software or
front panel.
2 Wait ten minutes (ion source cooling time).
3 Turn off the pumps by the <shutdown> command.
4 Wait for the system to be vented (approx. 10 minutes).
5 Remove the mains power connector for the GSD 320.
6 Remove the front cover of the GSD 320, the inlet heater box, and the insulation
according to Removing the front cover, Removing the inlet heater box, and Removing
the insulation and adjusting the capillary sections of this manual.
7 Using an open ended wrench size 1/4 inch detach the quartz capillary from the gas
inlet flange.
8 Unfasten the M3 x 6 screws. (See Figure 10-26.)
9 Lift the complete gas inlet out of the GSD 320.
10 Replace the pressing screw and orifice. (See Figure 10-26.)
WARNING
When working in a vacuum area, always wear lint free gloves and use clean tools.
NOTE
A ThermoStar gas inlet kit is required for orifice replacement on the GSD 320
ThermoStar. Ordering Number: PT 162 002
WARNING
When working with a corrosive system parts that come in contact with process gas may
possibly be contaminated.
CAUTION
If the capillary is still hot, allow it to cool down.
DANGER
Quartz capillaries break easily. Wear protective goggles.