SevenStar D07 Series - D07-7 K,7 Km 标准订单填写格式

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7.8 D07-7K、7KM 标准订单的填写格式
D07-[t] [g,g,g] [r,r,r,r] [f,f] [s] [m] [d]
[t] –型号
- [7K ] 质量流量控制器
- [7KM] 质量流量计
[g,g,g] – 使用气体
依照标准SEMI52-0302
例如:
-[ 013 ] N
2
-[ 007 ] H
2
-[ 000 ] 混合气体详见[d]
[r,r,r,r] –满量程流量
- [ 020C] 20SCCM
- [ 030C] 30SCCM
- [ 050C] 50SCCM
- [ 100C] 100SCCM
- [ 200C] 200SCCM
- [ 300C] 300SCCM
- [ 500C] 500SCCM
- [ 001L] 1SLM
- [ 002L] 2SLM
- [ 003L] 3SLM
- [ 005L] 5SLM
- [ 010L] 10SLM
- [ 000C] 特殊量程详见
[d]