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c. If Valve switch is on the position of PURGE, the flow rate will reach up to the maximum value after gas and
power supplying, which will have the function of air blasting to the gas circuit.
d. If Valve switch is on the position of AUTO and presetting is not zero, open the gas after power supply, the flow
rate will have a big overshoot and then rapidly reach to the stable presetting value, this kind of operation should
better be avoided.
e. The best operating sequence should be:
1.Open the power supply; 2. Turn the Valve switch on OFF position; 3. Open the gas supply; 4. Warm up for
minutes to have stable zero point movement; 5. Turn the switch on AUTO position; 6. Set flow rate under
request. This is the best way to operate without an overshooting.
5.1.2 PURGE
When need air blasting and cleaning bypass and tube, users could turn the switch on PURGE position, during the
purging, flow rate value should reach up to times or even several decuples of the full scale flow value. If shutoff
gas supplying, it could be vacuum pumping to get rid of MFC internal or upper reaches remained gas matching
request. And then shut off valves, open gas supply again and turn it to AUTO position.
5.1.3 PC Connection By Displayer
Please find the reference in Figure 1 and Figure 9，it should set the switch of displayer to the
EXT and turn switch to the AUTO position, and then startup PC.
5.1.4 Directly PC Connection
Please have the reference in Figure 1 and Figure 10, after MFC warming up, it could have PC startup.
5.1.5 Valves Drive
When the valve switch sets to AUTO position, users could perform valves drive wire of external control signal
socket, please find the reference in Figure 3 and Figure 9. When valve drive wire connects with +15 V, valves
will be shutoff; when valve drive wire connects with –15 V, valves will be turned to the top of maximum to purge
position; when valve drive wire hangs in the air, it’s in the auto-control situation.
5.1.6 Shut Off Operation
After shutoff power supply, flow will be cut off automatically. It should be better shut off gas supply (Turn valve
switch to OFF position and close the cut-off valve of gas circuit) before power supply.
5.2 MFM Operation
5.2.1 Start Up
Please warm up for 15 minutes by power supply before MFM operating.
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