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2. SPECIFICATION
Table 1.Specifications of D07-7K
No. Item D07-7K
1 Ranges of Flow (20,30,50,100,200,300,500) SCCM
( 0~1,2,3,5,10) SLM
2 Accuracy ± 1 % F.S
3 Linearity ± 1 % F.S
4 Repeatability ± 0.2 %F.S
5
Response-Time
(0~100%)
Electronic characteristic:
≤4 sec
Gas characteristic:
≤4 sec
6 Operation Pressure (0.1 ~ 0.5) MPa
7
Temperature coefficient
Zero: ≤±0.1% F.S./; Span: ≤±0.2% F.S./;
8 Max Pressure 3 MPa
9 Operation Temperature 5 ~ 45
10 Input/Output Signal 0 V ~ +5.00 V(Input resistance value 100K, output current 3mA)
11 Valve N.C.Solenoid
12 Power Supply +15 V 50 mA; -15V 200 mA
13 Dimension
According to Figure 4
14 Weight 1.1 kg
Notes :
MFC/MFM is calibrated by N
2
as a standard gas.
Units: SCCM (Standard cubic centimeter/min);
SLM (Standard liter/min)
Standard situation: Temperature 273.15K (0 ºC); Air pressure 101325 Pa (760mm Hg)
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