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9. APPENDIX
9.1 Mass Flow Conversion Factors
Table 4. Conversion Factors
GAS
GAS CODE
(SEMIE52-0302)
HEAT
( Cal/g )
ρ
(g/l 0 )
Factors
Air 008 0.2400 1.2930 1.006
Ar 004 0.1250 1.7837 1.415
AsH
3
035 0.1168 3.4780 0.673
BBr
3
079 0.0647 11.1800 0.378
BCl
3
070 0.1217 5.2270 0.430
BF
3
048 0.1779 3.0250 0.508
B
2
H
6
058 0.5020 1.2350 0.441
CCl
4
101 0.1297 6.8600 0.307
CF
4
063 0.1659 3.9636 0.420
CH
4
028 0.5318 0.7150 0.719
C
2
H
2
042 0.4049 1.1620 0.581
C
2
H
4
038 0.3658 1.2510 0.598
C
2
H
6
054 0.4241 1.3420 0.481
C
3
H
4
068 0.3633 1.7870 0.421
C
3
H
6
069 0.3659 1.8770 0.398
C
3
H
8
089 0.3990 1.9670 0.348
C
4
H
6
093 0.3515 2.4130 0.322
C
4
H
8
104 0.3723 2.5030 0.294
C
4
H
10
111 0.4130 2.5930 0.255
C
5
H
12
240 0.3916 3.2190 0.217
CH
3
OH 176 0.3277 1.4300 0.584
C
2
H
6
O 136 0.3398 2.0550 0.392
C
2
H
3
Cl
3
112 0.1654 5.9500 0.278
CO 009 0.2488 1.2500 1.000
CO
2
025 0.2017 1.9640 0.737
C
2
N2 059 0.2608 2.3220 0.452
Cl
2
019 0.1145 3.1630 0.858
D
2
014 1.7325 0.1798 0.998
F
2
018 0.1970 1.6950 0.931
GeCl
4
113 0.1072 9.5650 0.267