CONTENTS
1. APPLICATION & FEATURES……………. 1 5.2.1 Start Up ………………………………….. 15
2. SPECIFICATION………………………….. 2 5.2.2 Zero Test and Adjustment………………….. 15
3. STRUCTURE & PRINCIPLE……………... 4 5.2.3 Gas Supply…………………………………. 16
3.1 Structure……………………………………. 4 5.2.4 Shut Off……………………………………. 16
3.2 Operation Principle………………………… 4 6. CAUTION…………………………………… 17
4. INSTALLATION …………………………. 7 6.1 Medium Forbidden …………………………... 17
4.1 Receipt and Upacking………………………. 7 6.2 Corrosive Gas ……………………………….. 17
4.2 Dimension………………………………….. 7 6.3 Valves Sealing ……………………………….. 17
4.3 Fittings……………………………………… 8 6.4 Valves operating...……………………………. 17
4.4 Electrical Interfacing ……………………... 9 6.5 Installation Position ………………................. 17
4.5 PC Connections……………………………... 11 6.6 Operation Pressure Resistance………………. 17
4.6 Zero Adjustment……………………………. 12 6.7 Calibration and Conversion………………….. 18
5. OPERATION INSTRUCTIONS………….. 14 6.8 D07-7K, 7KM Ordering Code……………… 19
5.1 MFC Operation…………………………….. 14 7. TROUBLESHOOTING…………………….. 22
5.1.1 Start Up…………………………………… 14 8. WARRANTY & SERVICE………………….. 24
5.1.2 Purge……………………………………… 15 8.1 Product Warranty…………………………….. 24
5.1.3 Readout Box & PC Connections………..... 15 8.2 Specific warranty requirements ……………… 24
5.1.4 PC Connections..…………………………. 15 8.3 Service…………………..…………………… 24
5.1.5 Valves Drive...……………………………. 15 9. APPENDIX…………………………….……. 25
5.1.6 Shut Off Operation……………………….. 15 9.1 Mass Flow Conversion factors……………..... 25
5.2 MFM Operation…………………………….. 15 9.2 Conversion factors Introduction....................... 27
MASS FLOW CONTROLLER & MASS FLOW METER
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